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The new TS-series
covers a wide range of applications.

max. load capacities	120 - 2400 kg
dimensions	400x450x75 mm³ - customizable
frequency	0.7 - 1000 Hz (active damping)

Key applications
- SPM / AFM / SNOM / SEM
- Confocal Laser Microscopy
- Interferometry
- Metrology/Profilometry
- Nano Lithography
- Ultrathin Film Applications

Active versus passive isolation
Microstructure on etched SiO₂

[more info]

Contact

New modular TS200M
This new modular system of the
TS family has been developed to isolate medium and larger equipment (e.g. SEM).
[more news]

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